Coupling fitting
During fabrication of semiconductor devices from silicon wafers, numerous processes are carried out prior to cutting the wafer into individual chips for packaging. At certain phases throughout fabrication of some semiconductor gadgets, wet fabrication processes are used resembling wet etches. The chemical compounds used throughout these wet processes reminiscent of acids or alkalies reside in quartz tanks which are immune to corrosion and high heat. Quartz tanks are additionally used as a part of a system for cleansing silicon wafers, or in a chemical distribution system of a semiconductor production line.
A quartz tank usually includes a quartz outlet/inlet pipe that is in communication with an artificial resin tube used to convey chemical compounds into or out of the quartz tank. Quartz pipes are utilized for distributing chemical compounds since such pipes have high chemical resistance properties, stress tightness, heat resistance, and the like. Numerous fittings or pipe joints have been used to attach quartz pipes with synthetic resin tubes.
For instance, U.S. Pat. No. 5,516,159 to Hirakawa et al. discloses a quartz pipe joint including a joint body having a pipe receiving portion into which a quartz pipe is to be inserted, a ring-like sealing member held on the pipe receiving portion of the joint body, and a deformable lock ring. A nut to be externally fitted onto the quartz pipe and related to the joint physique can also be supplied, together with a urgent piece disposed in the nut.
A problem with typical quartz pipe fittings is that they are tough to govern throughout routine upkeep procedures, both during meeting and disassembly of the fittings. Typical quartz pipe fittings are particularly troublesome to assemble and disassemble in cramped areas, corresponding to areas underneath quartz tanks the place the quartz pipe fittings are situated and that are tough for upkeep personnel to access. These areas typically have a scorching acid surroundings, adding to the difficulties which maintenance personnel have in performing maintenance procedures with typical fittings in place. The threads on standard fittings are typically very high-quality, making it tough to make connections between the quartz pipe of the tank and different tubing. In addition, typical quartz pipe fittings typically leak and are available apart, adding to the time needed to carry out repair and upkeep procedures.
Whereas there are a number of fast-connect sort fittings accessible, comparable to quick-connect pneumatic fittings and several varieties of water fittings, none of these are tailored for software to a quartz tank and none can be positioned between present fittings in a piping system with out modification of such fittings in some way.
The present invention is directed to a ramp-lock fast-connect fitting machine offering fluid communication between tubular members equivalent to a pipe and a flexible tube. The short-connect becoming of the invention is tailored to be placed between conventional kind fittings on piping methods usually utilized in business similar to quartz pipes and synthetic resin tubes utilized in chemical processing techniques for semiconductor device fabrication. The gadget of the invention offers a quick connect/disconnect coupling for typical fittings that are in any other case difficult to assemble and disassemble. The system of the invention thus converts the connection of a standard becoming into a quick join/disconnect coupling.
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